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Semiconductor
Wafer Detection
Small spot is provided by laser diode.
Laser fiber optic sensor
FR720LD
Detection of wafers in wafer carrier
To detect the presence or absence of wafers.
Amplifier built-in photo sensor
GA-M3R
Collective detection of glass substrates
Detection of glass substrates in cassette.
Glass substrate sensor
ASW Series
Glass wafer detection
Ultrasonic detector reliably detects wafers with water drops on them.
Ultrasonic sensor
US-R25
Silicon Wafer Detection
Compact ultrasonic sensor used for "underneath" detection.
Ultrasonic sensor
US-S25AN
Glass panel detection
Comb sensor detects the glass substrate stably.
Comb sensor
ASW-CU100R/CU60R
Level detection for liquid
Amplifier built-in photo sensor
UM Series
Detection of IC frame pitch holes
Small holes reliably detected with fiber cable in combination with lens unit.
Fiber optic sensor
FX84BC FA240
Wafer notch detection
Coaxial reflective-type fiber cable with lens unit detecting small spot for notch detection.
Fiber optic sensor
FX84BC FA200
Detection of glass substrate protrusion
Narrow-view fiber optic cable detecting substrate protrusion from cassette.
Fiber optic sensor
FTN5BC
Robot arm-mounted sensor
Limited reflection type fiber optic cable integrated in arm.
Fiber optic sensor
FZV8301BC
Detection of work on IC tester
Passage of flat ICs checked.
Fiber optic sensor
F2R FT8BC
Wafer detection in carrier
Wafer edges detected.
Fiber optic sensor
F2R FR7BC
Detection of ICs in transparent sticks
Ultra-thin sensor fitting in space between sticks.
Amplifier built-in photo sensor
UM2-T15DT
Detection of wafer in cleaning tank
PFA sensor installed inside tank.
Amplifier built-in photo sensor
PF-T3DS
Collective detection of wafers
Presence of wafers in cassette collectively checked for mapping.
Wafer sensor
ASW-SG Series
Lead Frame Detection
Thin head of only 2mm in thickness detecting lead frames from underneath.
Fiber optic sensor
F70AR FZV8202BC
Detection of glass substrate for PDP
Glass substrates detected in vacuum chamber.
Vacuum fiber optic cable
FR720LD
Detection of chips on lead frames
Variable-focus spot type reflective laser sensor for checking presence of chips.
Laser sensor
LD-S20R
Detection of protrusion of wafers
Protrusion of wafer detected for prevention of trouble.
Fiber optic sensor
FTV7BC
Detection of LCD board in vacuum tank
General-purpose fiber optic cable mounted in V-shape detecting through view-port using specular reflection.
Fiber optic sensor
FT105BC
Hard disk mapping
Smaller-pitch of LCD glass substrate sensor is ideal for this application.
Glass substrate sensor
ASW Series
Robot hand detection
Detection of Robot hand with glass substrate mounted on it in order to initiate stopping XY stage movement.
Wide area sensor
SSC-T800 Series
Wafer carrier detection
Wafer carrier detected through viewport of vacuum tank.
Background suppression photo sensor
DL-S10R
Wafer Detection
Small spot is provided by laser diode.
Laser fiber optic sensor
FR720LD
Detection of wafers in wafer carrier
To detect the presence or absence of wafers.
Amplifier built-in photo sensor
GA-M3R
Wafer Detection
Small spot is provided by laser diode.
Laser fiber optic sensor
FR720LD
Detection of wafers in wafer carrier
To detect the presence or absence of wafers.
Amplifier built-in photo sensor
GA-M3R